Electrostatic Deflectors

Electrostatic deflectors are elements for charged particle guiding and deflection in beamlines. The deflector system consists of four separated segments, two for horizontal (X) and two for vertical (Y) deflection. We offer various designs to suit specific customers needs.

Normally, one X-Y-deflection setup is used to slightly correct a charged particle beam direction inside a beamline or two X-Y-deflectors are positioned in a certain distance to realize a parallel shift of the beam. For these applications, electrode voltages of up to ± 500 V are sufficient.

Furthermore, customer-specific developments for scanning a beam e.g. over a large target area can be offered where deflection voltages up to 5 kV are required. Special solutions can also include the option of re-focussing the beam during deflection by superimposing a certain lens voltage onto both deflector electrodes simultaneously. Therefore, lens voltages up to 30 kV are possible.